TNW Faculty

Kavli Nanolab Delft

Nanotechnology is the new frontier. Forces that breach the frontier are the instruments that can shape and control materials on the smallest scale: down to the scale of single atoms.

Delft University of Technology has a major program on nanoscience and -technology. Many researchers and students make, study, and use nanostructures. Important fabrication steps take place in the Kavli Nanolab Delft, part of the university’s succesfull Kavli Institute of Nanoscience.

The Kavli Nanolab Delft has a twofold function:

  1. Infrastructure for nanofabrication
  2. Education, research and development of new nanotechnologies

Facility function

Kavli Nanolab Delft is open to researchers from Delft University of Technology, from other Dutch and foreign universities, and from industry. The basic figures and capabilities are summarized in a 2 page flyer. The Kavli Nanolab Delft participates in the national organization NanoLab NL, a virtual laboratory located at four universities in the Netherlands.

Its facilities are:

  • High-resolution electron beam lithography
  • Optical lithography
  • Focused ion beam
  • Mask fabrication for optical lithography
  • Physical vapour deposition (evaporation, sputtering)
  • Chemical vapour deposition (LPCVD, PECVD, ALD)
  • Dry etching
  • Wet processing
  • Thermal processing
  • High resolution inspection

All equipment is installed in a high class 10000 cleanroom environment of the Van Leeuwenhoek Laboratory and can be reserved by trained users.

For more information about possibilities/opportunities one is welcome to contact our staff members.

Naam auteur: Simone Bots
© 2014 TU Delft