World''s smallest structure fabricated with an electron beam

Dr. Kees Hagen and his PhD student Willem van Dorp from the Charged Particle Optics (CPO) group directed by prof. Pieter Kruit, department of Imaging Science & Technlogy have demonstrated that there is room for improvement for the minimum size of structures written by Electron Beam Induced Deposition (EBID). Using a scanning transmission electron microscope (STEM), they have written tungsten containing dots with an average diameter of 1.0 nm, thereby setting the new world record for EBID.