Charged Particle Optics

Our research group (Deeltjesoptica in Dutch) is operating in the field of charged particle optics, which means that we manipulate beams of electrons, positrons and ions.

Our ambition is to develop improved tools to look at the microscopic world and to invent new methods to create microscopic structures, even down to nanometer size. For that purpose we advance the fundamental understanding of relevant physical phenomena such as electron emission and we design innovative, sometimes revolutionary electron- and ion beam instruments, for the future semiconductor production, as well as for the fabrication of nanostructures. We presently hold the world record for the direct-writing of small structures using a focused electron beam.

Our research group CPO, directed by professor Pieter Kruit, belongs to the Department of Imaging Physics of the Faculty of Applied Sciences.


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